Micro Thermal Conductivity Sensor/Heater
This is a SEM photograph of an actual fabricated prototype 4nl dead
volume thin film thermal conductivity detector/heater element. Its dimensions were 3um
wide, 3-4 um thick, and about 500um long. It was self-supporting and
made with 5% Rh-Platinum etched on a silicon wafer. It had an
electrical time constant of 40uS and a volumetric time constant of
2015 by The Eastjesus Company. All rights reserved.